The piezoelectric stages X60S / X120S have a stroke up to 110 μm along the X axis and can be equipped with Strain Gauges for a very fine accuracy up to 10 nm. Parasitic rotations (along X and Y axis) are very limited. The moving frame can be custom designed (attachment points, holes …).
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References
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Unit
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X60S
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X120S
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Item Code
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V-XS60
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V-XS120
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Notes
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Preliminary data
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Preliminary data
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Sensors option
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SG
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SG
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Active axis
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TX
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TX
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Max. No-load displacement[Tx]
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um
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55
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115
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Max. out of plane Z displacement
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um
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0.50
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0.50
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Max. parasitic Z rotations
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urad
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-
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-
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Max. parasitic XY rotations
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urad
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5
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5
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Voltage range
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V
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-20…150
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-20…150
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Stiffness
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N/um
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1.82
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0.33
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Height(Z axis)
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mm
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12
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12
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Dimensions(X&Y axis)
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mm
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30*30
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30*30
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Resolution
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nm
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0.6
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1.2
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Mass
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g
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70
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70
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Unload resonance frequency(in the actuation’s direction)
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Hz
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600
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1200
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Response time
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ms
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0.83
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0.42
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Capacitance (per electrical port)
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uF
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1.55
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1.55
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Mechanical interfaces(payload)
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4 M3 threaded holes on[]17*17
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4 M3 threaded holes on
[]17*17
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Mechanical interfaces(frame)
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4 Ф3.5mm holes on []17*17
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4 Ф3.5mm holes on []17*17
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Electrical interfaces
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2 PTFE insulated AWG 30 wires 100 mm long withФ1 banana plug
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2 PTFE insulated AWG 30 wires 100 mm long withФ1 banana plug
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