XM Series Ultra-Precision Linear Motor Stages
Feature：
● Ultra-high Performance with Minimum Incremental Motion of 1 nm
● Non-contact, direct-drive system ensures ultra-precision motion with high dynamics and reliability
● Sub-nm, high precision glass scale encoder provides accurate position feedback with 80 nm repeatability
● Extra-large, ironless, high-efficiency linear motor minimizes heat generation
● Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration/